Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037780 | Method for manufacturing semiconductor device with helium-containing gas | Masaki Tokunaga, Jun Kawahara | 2021-06-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037780 | Method for manufacturing semiconductor device with helium-containing gas | Masaki Tokunaga, Jun Kawahara | 2021-06-15 |