Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199247 | Winding transmission body tension device | Hideaki Seki | 2021-12-14 |
| 11118262 | Substrate processing apparatus having a gas-mixing manifold | Masaki Hirayama | 2021-09-14 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199247 | Winding transmission body tension device | Hideaki Seki | 2021-12-14 |
| 11118262 | Substrate processing apparatus having a gas-mixing manifold | Masaki Hirayama | 2021-09-14 |