Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155917 | Atomic layer deposition of rhenium containing thin films | Mikko Ritala, Markku Leskelä | 2021-10-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155917 | Atomic layer deposition of rhenium containing thin films | Mikko Ritala, Markku Leskelä | 2021-10-26 |