Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004644 | Inverted cylindrical magnetron (ICM) system and methods of use | Tianzong Xu, Oahn Nguyen | 2021-05-11 |
| 10954598 | High throughput vacuum deposition sources and system | — | 2021-03-23 |