Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11103960 | Method of separating surface layer of semiconductor crystal using a laser beam perpendicular to the separating plane | Yury Toomasovich Rebane, Aleksey Vladimirovich Mironov | 2021-08-31 |