Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11032945 | Heat shield assembly for an epitaxy chamber | Yoshinobu Mori | 2021-06-08 |
| 10978324 | Upper cone for epitaxy chamber | Yoshinobu Mori, Yuji Aoki | 2021-04-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11032945 | Heat shield assembly for an epitaxy chamber | Yoshinobu Mori | 2021-06-08 |
| 10978324 | Upper cone for epitaxy chamber | Yoshinobu Mori, Yuji Aoki | 2021-04-13 |