Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187992 | Predictive modeling of metrology in semiconductor processes | Anantha R. Sethuraman, Koushik Ragavan | 2021-11-30 |
| 11088039 | Data management and mining to correlate wafer alignment, design, defect, process, tool, and metrology data | Anantha R. Sethuraman, Koushik Ragavan, Karanpreet Aujla | 2021-08-10 |