Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195691 | Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample | Robert Trauner, Bernhard Schuler, Bernhard Mueller, Kulpreet Singh VIRDI | 2021-12-07 |