Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996572 | Model based dynamic positional correction for digital lithography tools | Tamer Coskun, Qin Zhong, Pacha Mongkolwongrojn | 2021-05-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996572 | Model based dynamic positional correction for digital lithography tools | Tamer Coskun, Qin Zhong, Pacha Mongkolwongrojn | 2021-05-04 |