Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133204 | Chamber matching with neural networks in semiconductor equipment tools | Heng HAO, Tianqing Liao, Sima Didari | 2021-09-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133204 | Chamber matching with neural networks in semiconductor equipment tools | Heng HAO, Tianqing Liao, Sima Didari | 2021-09-28 |