Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11077536 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Shou-Sung Chang, Paul D. Butterfield +2 more | 2021-08-03 |
| 10967483 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Shou-Sung Chang, Paul D. Butterfield +2 more | 2021-04-06 |