Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11136670 | Gas spraying apparatus, substrate processing facility including the same, and method for processing substrate using substrate processing facility | Chang Kyo Kim | 2021-10-05 |
| 10985040 | Substrate treatment method and substrate treatment apparatus | Yong Soo MOON, Gun Bum Lee | 2021-04-20 |