Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069789 | Varied silicon richness silicon nitride formation | Yi Ma, Shenqing Fang | 2021-07-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069789 | Varied silicon richness silicon nitride formation | Yi Ma, Shenqing Fang | 2021-07-20 |