Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11165404 | Method for fabricating an acoustic resonator device with perimeter structures | Ramakrishna Vetury, Alexander Y. Feldman, Michael D. Hodge, Art Geiss, Shawn R. Gibb +3 more | 2021-11-02 |
| 11063204 | Method of manufacture for single crystal acoustic resonator devices using micro-vias | Alexander Y. Feldman, Mark D. Boomgarden, Jeffrey B. Shealy, Ramakrishna Vetury | 2021-07-13 |
| 10992279 | Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications | Ramakrishna Vetury, Alexander Y. Feldman, Michael D. Hodge, Art Geiss, Shawn R. Gibb +3 more | 2021-04-27 |
| 10979011 | Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications | Ramakrishna Vetury, Alexander Y. Feldman, Michael D. Hodge, Art Geiss, Shawn R. Gibb +3 more | 2021-04-13 |
| 10931251 | Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications | Ramakrishna Vetury, Alexander Y. Feldman, Michael D. Hodge, Art Geiss, Shawn R. Gibb +3 more | 2021-02-23 |