Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10883171 | CVD reactor and method for cleaning a CVD reactor | Marcel KOLLBERG, Wilhelm Josef Thomas KRÜCKEN, Markus Deufel, Mike Pfisterer | 2021-01-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10883171 | CVD reactor and method for cleaning a CVD reactor | Marcel KOLLBERG, Wilhelm Josef Thomas KRÜCKEN, Markus Deufel, Mike Pfisterer | 2021-01-05 |