Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181489 | Determining tilt angle in patterned arrays of high aspect-ratio structures by small-angle x-ray scattering | Regis Joseph Kline, Daniel F. Sunday, Wenli Wu, Osman Sorkhabi, Jin Zhang +1 more | 2021-11-23 |