Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195735 | Load lock for a substrate container and device having such a load lock | — | 2021-12-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195735 | Load lock for a substrate container and device having such a load lock | — | 2021-12-07 |