Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10979013 | Method of manufacturing piezoelectric thin film resonator on non-silicon substrate | Da Chen, Hongfei Wang, Peng Wang, Xiaojun Zhang | 2021-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10979013 | Method of manufacturing piezoelectric thin film resonator on non-silicon substrate | Da Chen, Hongfei Wang, Peng Wang, Xiaojun Zhang | 2021-04-13 |