Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079674 | Method and apparatus for ascertaining a repair shape for processing a defect of a photolithographic mask | Jens Oster | 2021-08-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079674 | Method and apparatus for ascertaining a repair shape for processing a defect of a photolithographic mask | Jens Oster | 2021-08-03 |