Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11000782 | Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device | Fuping Chen, Hui Wang, Xi Wang, Danying Wang, Chaowei Jiang +2 more | 2021-05-11 |