Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844488 | Chuck systems and methods having enhanced electrical isolation for substrate-biased ALD | Michael J. Sershen | 2020-11-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844488 | Chuck systems and methods having enhanced electrical isolation for substrate-biased ALD | Michael J. Sershen | 2020-11-24 |