AB

Adam Bertuch

VI Veeco Instruments: 1 patents #3 of 26Top 15%
Overall (2020): #562,246 of 565,922Top 100%
1
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10844488 Chuck systems and methods having enhanced electrical isolation for substrate-biased ALD Michael J. Sershen 2020-11-24