Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529532 | Ion source and ion implantation apparatus | Takumi YUZE, Toshihiro Terasawa | 2020-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529532 | Ion source and ion implantation apparatus | Takumi YUZE, Toshihiro Terasawa | 2020-01-07 |