Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10744616 | Wafer polishing method and apparatus | Tomonori Kawasaki | 2020-08-18 |
| 10710209 | Wafer polishing apparatus and polishing head used for same | Ryuichi Tanimoto, Hironori Kaneko | 2020-07-14 |