Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10676840 | Method of evaluating manufacturing process of silicon material and manufacturing method of silicon material | Noritomo Mitsugi, Shuichi Samata, Ayumi Masada | 2020-06-09 |
| 10641708 | Method of evaluating semiconductor substrate and method of manufacturing semiconductor substrate | Tsuyoshi Kubota | 2020-05-05 |