PS

Paul Silverstein

AT Axcelis Technologies: 1 patents #10 of 30Top 35%
Overall (2020): #319,729 of 565,922Top 60%
1
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10535498 Lanthanated tungsten ion source and beamline components Neil K. Colvin, Tseh-Jen Hsieh 2020-01-14