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Method of manufacturing support structures for lighting devices and corresponding device |
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Process for manufacturing a MEMS micromirror device, and associated device |
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MEMS device including a capacitive pressure sensor and manufacturing process thereof |
Enri Duqi, Roberto Carminati |
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Micro-electro-mechanical device having two buried cavities and manufacturing process thereof |
Enri Duqi, Marco Del Sarto, Mikel AZPEITIA URQUIA |
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Micro-electro-mechanical device and manufacturing process thereof |
Enri Duqi, Flavio Francesco Villa |
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Process for manufacturing a MEMS pressure sensor, and corresponding MEMS pressure sensor |
Sarah Zerbini, Enri Duqi |
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Microelectromechanical transducer with thin-membrane for high pressures, method of manufacturing the same and system including the microelectromechanical transducer |
Enri Duqi |
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