Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804408 | Process to reduce plasma induced damage | Jianheng Li, Yujia Zhai, Soo Young Choi | 2020-10-13 |
| 10748759 | Methods for improved silicon nitride passivation films | Jianheng Li, Soo Young Choi | 2020-08-18 |
| 10697063 | Corner spoiler for improving profile uniformity | Gaku Furuta, Qunhua Wang, Robin L. Tiner, Beom Soo Park, Soo Young Choi +1 more | 2020-06-30 |