IB

Ilya Bezel

KL Kla-Tencor: 6 patents #11 of 345Top 4%
KL Kla: 2 patents #1 of 106Top 1%
Overall (2020): #14,601 of 565,922Top 3%
8
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10823943 Plasma source with lamp house correction Shiyu Zhang 2020-11-03
10806016 High power broadband illumination source Oleg Khodykin 2020-10-13
10714307 Neutral atom imaging system Eugene Shifrin, Gildardo Delgado, Rudy F. Garcia 2020-07-14
10714327 System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination Anatoly Shchemelinin, Eugene Shifrin, Matthew Derstine 2020-07-14
10690589 Laser sustained plasma light source with forced flow through natural convection Kenneth P. Gross, John Szilagyi 2020-06-23
10691024 High-power short-pass total internal reflection filter Wei Zhao 2020-06-23
10616987 System and method for imaging a sample with an illumination source modified by a spatial selective wavelength filter Wei Zhao, Kenneth P. Gross, Matthew Panzer 2020-04-07
10568195 System and method for pumping laser sustained plasma with a frequency converted illumination source Anatoly Shchemelinin, Matthew Derstine 2020-02-18