Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573526 | Method of charge controlled patterning during reactive ion etching | Sunit S. Mahajan, Richard S. Wise | 2020-02-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573526 | Method of charge controlled patterning during reactive ion etching | Sunit S. Mahajan, Richard S. Wise | 2020-02-25 |