Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10864556 | Tank for substrate cleaning, tank heating apparatus, tank heating method, and substrate cleaning apparatus | Zhiguang Guo, Dahu Tang, Xin Cai, Jianfeng Liu, Jing Li | 2020-12-15 |