Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573541 | System for semiconductor wafer retention and sensing in a vacuum load lock | — | 2020-02-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573541 | System for semiconductor wafer retention and sensing in a vacuum load lock | — | 2020-02-25 |