EM

Edward K. McIntyre

AT Axcelis Technologies: 1 patents #10 of 30Top 35%
Overall (2020): #484,008 of 565,922Top 90%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10692749 Method to provide consistent electrostatic clamping through real time control of electrostatic charge deposition in an electrostatic chuck William P. Reynolds 2020-06-23