Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10705420 | Mask bias approximation | Song Lan, Ke Zhao, Yang Cao | 2020-07-07 |
| 10656530 | Application of FreeForm MRC to SRAF optimization based on ILT mask optimization | Ke Zhao, Jiangwei Li | 2020-05-19 |
| 10578963 | Mask pattern generation based on fast marching method | Yuan He, Jie Lin | 2020-03-03 |