Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879032 | Multi-beam inspection apparatus | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2020-12-29 |
| 10879031 | Apparatus of plural charged-particle beams | Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2020-12-29 |
| 10811222 | Apparatus of plural charged-particle beams | Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2020-10-20 |
| 10643820 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Zhongwei Chen | 2020-05-05 |
| 10586681 | Charged particle beam apparatus | Zhongwei Chen, Jack Jau | 2020-03-10 |
| 10573487 | Apparatus of plural charged-particle beams | Xuedong Liu, Shuai Li, Zhongwei Chen | 2020-02-25 |
| 10541110 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Juying Dou, Xuerang Hu, Zhongwei Chen | 2020-01-21 |