Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10526705 | Methods for controlling the substrate temperature using a plurality of flushing gases | Daniel Claessens, Hugo Silva | 2020-01-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10526705 | Methods for controlling the substrate temperature using a plurality of flushing gases | Daniel Claessens, Hugo Silva | 2020-01-07 |