Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10400167 | Etching compositions and methods for using same | Yi-Chia Lee, Tianniu Chen, Thomas Mebrahtu, Aiping Wu, Edward Tseng +1 more | 2019-09-03 |
| 10332784 | Selectively removing titanium nitride hard mask and etch residue removal | William Jack Casteel, Jr., Seiji Inaoka, Tianniu Chen | 2019-06-25 |
| 10301580 | Stripping compositions having high WN/W etching selectivity | Yi-Chia Lee, Tianniu Chen, William Jack Casteel, Jr., Seiji Inaoka, Gene Everad Parris | 2019-05-28 |