Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446387 | Apparatus and method to control etch rate through adaptive spiking of chemistry | Laura Mauer, John Taddei, James Swallow, David Goldberg | 2019-10-15 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446387 | Apparatus and method to control etch rate through adaptive spiking of chemistry | Laura Mauer, John Taddei, James Swallow, David Goldberg | 2019-10-15 |