MS

Michael J. Sershen

UL Ultratech: 1 patents #3 of 12Top 25%
📍 Cambridge, MA: #579 of 1,516 inventorsTop 40%
🗺 Massachusetts: #5,264 of 14,267 inventorsTop 40%
Overall (2019): #338,958 of 560,194Top 65%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10351950 Plasma enhanced ALD system Mark Sowa, Robert C. Kane 2019-07-16