Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403509 | Basal plane dislocation elimination in 4H—SiC by pulsed rapid thermal annealing | Marko J. Tadjer, Boris N. Feigelson, Nadeemullah A. Mahadik, Robert E. Stahlbush, Jordan D. Greenlee | 2019-09-03 |
| 10343900 | Material structure and method for deep silicon carbide etching | Francis J. Kub, Karl D. Hobart, Rachael L. Myers-Ward | 2019-07-09 |
| 10317210 | Whole angle MEMS gyroscope on hexagonal crystal substrate | Francis J. Kub, Karl D. Hobart, Rachael L. Myers-Ward, Eugene H. Cook, Marc S. Weinberg +1 more | 2019-06-11 |