Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10353191 | Circular scanning technique for large area inspection | Brian W. Anthony | 2019-07-16 |
| 10274942 | Method for determining abnormal equipment in semiconductor manufacturing system and program product | Liu-Lian Chen, Guo-Hai Zhang | 2019-04-30 |