Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10327318 | Adjusting a beam diameter and an aperture angle of a laser beam | Tolga Ergin, Thomas Schwarzbaeck | 2019-06-18 |
| 10264660 | Beam trap, beam guide device, EUV radiation generating apparatus, and method for absorbing a beam | — | 2019-04-16 |