Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403514 | Substrate transporting system, storage medium and substrate transporting method | Masaei Suwada | 2019-09-03 |
| 10326256 | Surface emitting laser and atomic oscillator | — | 2019-06-18 |