Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520839 | Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus | — | 2019-12-31 |
| 10465747 | Bearing structure and turbocharger | — | 2019-11-05 |
| 10393010 | Multi-arc bearing and turbocharger | — | 2019-08-27 |
| 10372046 | Measurement device and measurement method, exposure apparatus and exposure method, and device manufacturing method | — | 2019-08-06 |
| 10365568 | Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus | — | 2019-07-30 |