Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403472 | Ion implantation apparatus and measurement device | — | 2019-09-03 |
| 10217607 | Ion implantation apparatus and ion implantation method | Shiro Ninomiya, Akihiro Ochi, Toshio Yumiyama | 2019-02-26 |