Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497600 | Electrostatic chuck | Kosuke Yamaguchi, Jun Shiraishi, Ikuo Itakura, Shuichiro Saigan | 2019-12-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497600 | Electrostatic chuck | Kosuke Yamaguchi, Jun Shiraishi, Ikuo Itakura, Shuichiro Saigan | 2019-12-03 |