Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10450654 | Radical gas generation system | Yoichiro Tabata, Shinichi Nishimura | 2019-10-22 |
| 10418226 | Activated gas generation apparatus | Shinichi Nishimura, Yoshihito Yamada | 2019-09-17 |
| 10297423 | Plasma generation apparatus, CVD apparatus, and plasma-treated particle generation apparatus | Yoichiro Tabata | 2019-05-21 |