Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429738 | Filtration filter, filtration method, production method of purified liquid chemical product for lithography, and method of forming resist pattern | Akihiko Nakata, Akihito Morioka | 2019-10-01 |
| 10189968 | Varnish for porous polyimide film production and method for producing porous polyimide film using same | Mitsuharu Tobari, Masanori Ichikawa, Kaoru Ishikawa | 2019-01-29 |
| 10177357 | Method for producing porous polyimide film | Mitsuharu Tobari, Yoshitsugu Kawamura, Kaoru Ishikawa | 2019-01-08 |