Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514600 | Resist composition, method of forming resist pattern, compound, and acid diffusion control agent | Takashi Nagamine, Kyo Hatakeyama | 2019-12-24 |
| 10429740 | Method of recovering resist pattern | Junichi Tsuchiya, Rikita Tsunoda, Miki Shinomiya, Masafumi FUJISAKI | 2019-10-01 |