Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10423066 | Template, imprint device, and manufacturing method of semiconductor device | Masaki Mae | 2019-09-24 |
| 10192793 | Pattern formation method, imprint device, and computer-readable non-volatile storage medium storing drop recipe adjustment program | — | 2019-01-29 |