Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359702 | Development processing apparatus, development processing method, and storage medium | Takeshi Shimoaoki, Shogo Inaba | 2019-07-23 |
| 10203605 | Development method, development device, and non-transitory computer-readable storage medium | Takeshi Shimoaoki, Masahiro Fukuda, Kouichirou Tanaka | 2019-02-12 |
| 10185220 | Substrate processing method, substrate processing apparatus, and non-transitory computer-readable medium | Takeshi Shimoaoki, Masahiro Fukuda, Kouichirou Tanaka | 2019-01-22 |